The thermal decomposition of copper(II) hexafluoroacetylacetonate under MOCVD conditions

Abstract

Copper(II) hexafluoroacetonylacetonate (Cu hfacac) was transported in various carriers gases inside a silica tube furnace held at a temperature above its decomposition temperature. The decomposition products were collected on silica substrates placed along the length of the furnace. Identification of the deposits were carried out using X-ray diffraction, X-ray photoelectron spectroscopy and X-ray induced Auger spectroscopy. At a decomposition temperature of 753 K under dry argon the main decomposition product was metallic copper with small amounts of copper(I) oxide and ligand decomposition products. At a decomposition temperature of 753 K and in dry air the main product was copper(II) oxide. The proportion of ligand incorporated into the decomposition product under dry air was greatly reduced. At a decomposition temperature of 1073 K and in an air atmosphere, decomposition products were mainly copper(I) oxide with small amounts of metallic copper. Again, layer contamination was reduced at this temperature and atmosphere.