The synthesis of large-area diamond thin films using straight tungsten wires mounted under tension as the filaments

Abstract

Diamond thin films with an area larger than 40 × 40 mm 2 were synthesized using straight tungsten wires mounted under tension as the filaments in a hot-filament assisted chemical vapour deposition process. Hydrogen plus methane and acetone was used as feed gases. The nucleation of diamond on silicon substrate was examined by scanning electron microscopy (SEM). The deposited diamond films at different carbon concentrations (1.0–2.5%) were examined by X-ray diffraction, SEM and Raman spectroscopy.