Abstract
The CaCu3Ti4O12 (CCTO) thin films were synthesized via a metal-organic solution containing stoichiometric amounts of the metal cations at 700 °C for 1 h. The stable metal-organic solution was prepared by dissolving calcium nitrate, copper nitrate, and tetrabuty titanate in grain alcohol. The phases, microstructures, and electric properties of CCTO thin films were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscope, and electric measurements. The results show that the CCTO thin films have homogeneous microstructure, smooth surface, low leakage current, and high values of dielectric constant. The low leakage current can be attributed to the small surface roughness. The high value of dielectric constant can be attributed to the internal barrier layer capacitor mechanism and metal-insulator-semiconductor junction of CCTO thin films. Copyright © 2013 John Wiley & Sons, Ltd.
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