The superior performance of the electrochemically grown ZnO thin films as methane sensor

Abstract

Pd–Ag/ZnO/Zn and Rh/ZnO/Zn MIM (metal–insulator–metal) gas sensors were fabricated using nanoporous ZnO thin films, obtained by an electrochemical deposition method in the absence and presence of UV light. A high-purity Zn anode, a Pt cathode, a calomel reference electrode and a 0.3-M oxalic acid electrolyte were used for deposition. Pd–Ag (26%) and Rh were used separately as the catalytic metal electrodes to fabricate the two different types of MIM configurations. A gas response of the order of 3.85 ± 2, a response time of 5 ± 0.5 s and a recovery time of 16 ± 0.5 s were obtained with the Pd–Ag contact, while the Rh contact showed a response of the order of 4.82 ± 2, a response time of 24 ± 0.5 s and a recovery time of 72 ± 0.5 s, at the optimum temperature of 220 °C, which is the lowest temperature so far reported for metal oxide sensors to sense 1% methane in a N2 carrier gas. The undoped zinc oxide thin films grown by UV-assisted electrochemical anodization of high-purity Zn demonstrated a better performance for methane sensing. The experiments were repeated in synthetic air and a somewhat reduced performance was observed. The selectivity in the presence of hydrogen and the stability of the sensors were studied.