Abstract
This study focused on the ultrasonic nanomachining by atomic force microscopy (AFM) to understand the phenomena of the ultrasonic nanomachining. The workpiece is an Au/Ti thin film and coated on the quartz crystal resonator (QCR). The ultrasound vibration of workpiece is carried out by used the Quartz crystal microbalance (QCM). And a normal force measurement model was built by force curve measurements in ultrasound vibration environment. The influence of different experimental parameters can be studied such as normal force and repeat number on the cutting depth and chip stacking. After the experiments, it can be found that the ultrasonic nanomachining by AFM is possessed great influence on the cutting depth.
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