Abstract
This study focused on the combination of atomic force microscopy (AFM) and quartz crystal microbalance (QCM) to construct the ultrasound assisted AFM base nanomachining experimental platform, and to construct the experimental planning of ultrasonic assisted nanomachining, to understand the phenomena of the ultrasound assisted AFM base nanomachining. Firstly, we combined the AFM and QCM to construct the ultrasound assisted AFM base nanomachining experimental platform. And a normal force measurement model was built by force curve measurements in ultrasound vibration environment. Next, the ultrasonic assisted nanomachining was carried out and aimed at brittle and ductile materials to probe into the influence of different experimental parameters such as probe speed, normal force and workpiece material on the cutting depth, width and chip stacking. After the experiments, it is succeeded in the ultrasound assisted AFM base nanomachining experimental platform in this study. And it can be found that the ultrasonic assisted nanomachining is possessed great influence on the cutting depth and width.
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