The Study of Sputtered Barium Ferrite Thin Films

Abstract

Ba ferrite thin films were successfully prepared by using a facing target sputtering system. Magnetic, crystallized thin films were obtained both by ex-situ and in-situ processes. In this paper, thin films prepared by these two processes were studied on the aspects of crystal structure, magnetic properties and surface morphology. The mechanism of magnetization reversal of thin films prepared by both processes was discussed. It is found that the imperfection in the thin films strongly effects the magnetic properties of these films.