Abstract
A mono-energetic positron beam was applied for a study of native defects in GaAs. From measurements of Doppler broadening profiles and lifetime spectra of positrons, it was found that Ga-vacancies were introduced by Si-doping. On the other hand, for p-type GaAs, interstitial clusters were found to be introduced by Zn-doping. The observed species of defects are in agreement with those expected from the Fermi level.
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