Abstract
A ring resonator based on Silicon-on-Insulator (SOI) planar optical waveguide for micro biochemical sensor application is designed and simulated in this paper. The SOI optical waveguide is made with a ridge structure. According to the optical waveguide mode theory and the performance of the ring resonator, the size of the single mode ridge waveguide and the structure of the ring resonator are obtained. Based on the structure principle and the transmission mechanism of electric field of the ring resonator, the power transfer function and the parametric equation of sensitivity are derived. As a result, the value of Q of the ring resonator can reach 103 magnitudes. At last, the structure and the transmission mechanism of electric field in the ring resonator are simulated in MATLAB software.
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