Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator

Abstract

We demonstrate a MEMS-based 1x2 optical waveguide switch fabricated entirely within silicon-on insulator (SOI). The switch is formed by a suspended cantilever structure consisting of a single mode ridge waveguide in silicon; lateral electrostatic actuation by an adjacent electrode enables switching. Actuation voltages as low as 40 Volts are achieved, with switching speeds on the order of 130 μsec. We demonstrate extinction between ports of more than 31 dB. These switches can be easily integrated with conventional SOI-based waveguide devices to enable a low-power consumption, scalable device platform for telecommunications applications.