Abstract
This paper has successfully prepared thick and crack-free silica films with nano-porous structure at a high annealing temperature of 650 °C via sol–gel processing by introducing poly(ethylene glycol) (PEG) and side-chain polyether modified polydimethylsiloxane with terminal Si–CH3 (p-PDMS) as templates to the acid-catalyzed silica system. The differential thermal analysis (DTA), thermogravimetric analysis (TGA), FTIR spectra, ellipsometry, and field emitted scanning electron microscope (FESEM) were used to characterize the samples. The present work focused on the effect of the two polymer templates on the microstructures of samples, and a model concerning the pore formation was suggested.
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