Abstract
The scanning transmission electron microscope (STEM) represents a major advance in the microanalytical capabilities of instruments available to materials scientists. The STEM concept resulted from the desire to combine features of the transmission electron microscope (TEM), scanning electron microscope (SEM), and the electron microprobe. Several types of STEMs are currently in use; they can be divided into roughly three categories based on origin and philosophy of design. First are the “dedicated” STEMs, pioneered by Crewe and his coworkers, which generally use a field-emission electron gun housed in an ultra-high-vacuum system. A conventional TEM may also be equipped with a scanning attachment and an electron detector and/or spectrometer, yielding what may be referred to as a TEM(S). Finally, in practice an SEM may be fitted with a transmission stage; in this case the designation SEM(T) may be most appropriate. The first two designs are by far the most popular for currently available commercial instruments.
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