Abstract
Hydrogenated amorphous carbon (a-C:H) film is deposited on CoCrMo alloy by plasma immersion ion implantation and deposition (PIII-D) at different flow ratios of acetylene to argon (C 2H 2/Ar). The results show that Ar fraction in the C 2H 2–Ar gas mixture has an important effect on the structure and the adhesion of the a-C:H films. When Ar fraction in the C 2H 2–Ar gas mixture is less than 50%, the fabricated a-C:H film composition transfer from graphite-like to diamond-like which contains higher sp 3 binding thanks to Ar ion bombardment, and the adhesion strength decreased with the increment of Ar fraction. But when Ar fraction in the C 2H 2–Ar gas mixture is beyond 50%, the fabricated film contains more sp 2 bonding for thermally driven and exhibits higher adhesion strength with the increment of the Ar fraction.
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