Abstract
For the micro electrical mechanical system (MEMS) gas sensors, there are several methods available for integrating the sensing material with the micro-hotplate and interdigited electrodes (IDEs) that are fabricated through the MEMS process. To develop a method of manufacturing the MEMS gas sensors at the wafer level, the prerequisite is to develop a MEMS-compatible process for preparing the gas sensing material with good performance. in this chapter, principles, structures of the gas sensors based on the thin films of semiconducting metal oxide (SMO) are introduced, and the main factors influencing sensing performances of the gas sensors are analyzed. The sputtering methods applicable to deposit the SMO thin films are briefly described. The gas sensing properties of the sputtered SMO films can be attributed to factors such as microstructures, surface morphology, and so on, and then methods are given to improve the gas sensing properties of the SMO thin films by adjusting the sputtering parameters. Meanwhile, the sputtered SMO thin films for detecting hydrogen and ethanol are covered up, and the examples of the MEMS hydrogen and ethanol sensors are given in detail.
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