ZnO based NOx gas and VOC detection sensor fabrication techniques and materials

Abstract

Nano- or micro-nano gas sensors have attracted a lot of attention since they have the potential for several applications. Utilizing a coplanar integrated design of the microheater and the inter-digitated electrode, a chemo resistive ethanol gas sensor with a thin layer of zinc oxide (ZnO) as a sensing layer has been examined (IDE). The article's conclusion offers potential future paths and research opportunities for improved sensitivity and selectivity for these sensors. SnO2-based sensors have received a lot of attention in the field of hazardous gas detection because of their extraordinary sensitivity. ZnO thin films are created using a chemical method. Gas sensors must have reduced packaging because they are essential in modern industry for managing environmental concerns. Since the gas sensor must operate at temperatures higher than ambient temperature, using the heater is necessary. The heating mechanism for the detecting layer in the various gas sensors that have recently been developed is either external or incorporates additional layers. The suggested architecture might be helpful in cutting down on the number of layers that must be deposited for the sensor and additional heating circuits. A new architecture with a coplanar microheater and IDEs has been created to analyse the gas response. The ongoing work is built on the coplanar microheater with IDEs produced for the ethanol sensor. Additionally, studies have been conducted to examine how the sensor's sensing capabilities are impacted by the integrated architecture. The sensor detects a layer thickness of 430 nm with a sensing response of 110 the sensing layer is active over the substrate. The study's major goal is to show how an integrated coplanar microheater and IDE architecture may be used with ethanol sensor based on ZnO.