The spatial distribution of excitation temperature and electron density in an inductively coupled argon plasma

Abstract

The excitation temperature and electron density have been measured at various heights (with reference to an RF coil) in an inductively coupled argon plasma at atmospheric pressure. The electrical conductivity profile sigma (r) was calculated using the measured Texc(r) and ne(r) profiles. The conductivity values agree with the previous reported results. The excitation temperature profiles show an off-axis peak and it has been shown that it is related with skin depth. The Texc peak position is found to shift more towards the wall as the observation height is lowered.