Abstract
At present, the proportion and role of thin film bulk acoustic wave (FBAR) filters in mobile communication products are becoming more and more obvious due to its higher work frequency and smaller size. As a commonly used piezoelectric material, aluminum nitride (AlN) limits the bandwidth of the FBAR filter because of its small electromechanical coupling coefficient (kt 2) of ~6.5%. On contrast, lithium niobate (LiNbO3, LN) crystals with some certain specific orientations have much better acoustic properties, making this type of material the promising candidate for FBAR applications. In this work, the acoustic resonant mode in LN crystal is analyzed by FEM simulations. In order to obtain the optimal orientations with good longitudinal wave property, Euler angle (EA) method is used to simulate the resonant modes and calculate the corresponding kt 2 of different orientations. Besides, the correctness of EA method has been demonstrated in this work by comparing the displacement change under electrostatic field with the traditional matrix transformation operation depending on the piezoelectric effect. The simulations show that the 43°Y-cut LiNbO3 has a high kt 2 and a pure longitudinal wave vibration mode simultaneously, making this orientation the most proper candidate for FBAR filters application with large bandwidth.
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