Abstract
In order to simulate the frequency response of thin film bulk acoustic wave filter accurately, the MBVD model of film bulk acoustic wave filter chip and three dimension electro-magnetic model of package were respectively established. And then, the collaborative simulation of acoustic and electro-magnetic components was realized in ADS software. Finally, thin film bulk acoustic wave filter with working frequency of 2.825GHz and 5.6 GHz were designed and fabricated by this method. Insertion loss of 2.825GHz FBAR filter is less than 1.5dB, and rejection is more than 40dB. Insertion loss of 5.6GHz FBAR filter is less than 1.7dB, and rejection is more than 30dB. The simulation and experimental results show that the proposed method has good design precision and can simulate the influence of package on the performance of the filter accurately.
Highlights
Thin film bulk acoustic wave resonator (FBAR) filter has the advantages of higher operating frequency, smaller size, higher Q value and better power handling capability, comparing surface acoustic wave (SAW) filter, LC filter and ceramic filter [1]
FBAR filter is combined by multiple FBAR resonators in a certain circuit structure, including ladder structure and bridge structure [5]
Ladder structure is often used in single ended circuit, and the bridge structure is used in balance ended circuit structure
Summary
Thin film bulk acoustic wave resonator (FBAR) filter has the advantages of higher operating frequency, smaller size, higher Q value and better power handling capability, comparing surface acoustic wave (SAW) filter, LC filter and ceramic filter [1]. Traditional design method is to fit the equivalent circuit parameters of package by measuring the frequency response of the packaged filter, and use the equivalent circuit for the filter design [7]. The drawback of this approach is that in order to get accurate parameters, it needs to produce and measuring the device multi-times. The S parameters of package was achieved and added into FBAR filter MBVD model This method combined electro-magnetic and acoustic simulation, called full wave simulation. Using this method, FBAR filters working at 2.825GHz and 5.6GHz was designed, produced and measured
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