The Simulation Analysis of Temperature Effects on System Performance of Silicon Micro-Gyroscope

Abstract

The effects of temperature variation on the system performance is discussed in this paper. The temperature characteristic of the natural frequency and quality factor is analyzed theoretically firstly. Then the simulation models of the open-loop drive system, the closed-loop drive system, the closed-loop sense system and the quadrature correction system are constructed to simulate the temperature characteristic of the scale factor and zero bias. The simulation results demonstrate the relative change of the scale factor in the closed-loop drive system, that is 1.35%, almost decreases by 67 times relative to the open-loop drive system and the variation of the zero bias in the closed-loop drive system, that is 0.2789°/s, almost decreases by 364 times relative to the open-loop drive system. At the same time, the relative change of the scale factor in the closed-loop sense system, that is 0.000029%, almost decreases by 46551 times relative to the closed-loop drive system. The variation of the zero bias in the closed-loop sense system, that is 1.2×10-11°/s, almost decreases by 2.3×1010 times relative to the closed-loop drive system, which shows the proposed method is feasible and correct.