Abstract
Structural and optical properties of InAs quantum dot (QD) chains formed in etched GaAs grooves having different periods from 200 to 2000 nm in [010] orientation are reported. The site-controlled QDs were fabricated by molecular beam epitaxy on soft UV-nanoimprint lithography-patterned GaAs(001) surfaces. Increasing the groove periods decreases the overall QD density but increases the QD size and the linear density along the groove direction. The effect of the increased QD size with larger periods is reflected in ensemble photoluminescence measurements as redshift of the QD emission. Furthermore, we demonstrate the photoluminescence emission from single QD chains.
Highlights
Site-controlled quantum dots (QDs) have attracted great attention during the last decade due to their potential as novel applications in quantum information manipulation [1,2,3]
Patterning is usually accomplished by lithographic techniques, such e-beam lithography [7,8,9,10,11], nanoimprint lithography [12], interference lithography, photolithography [13], or atomic force microscopy (AFM) lithography [14]
Site-controlled QD epitaxy was focused on creating periodic arrays of single QDs used, e.g., as single photon sources embedded in microcavities [15, 16]
Summary
Site-controlled quantum dots (QDs) have attracted great attention during the last decade due to their potential as novel applications in quantum information manipulation [1,2,3]. In molecular beam epitaxy (MBE) processes, this can be achieved by defining the nucleation sites for impinging atoms using patterning the surface. Site-controlled QD epitaxy was focused on creating periodic arrays of single QDs used, e.g., as single photon sources embedded in microcavities [15, 16]. Another interesting topic emerged related to ordering of QDs in various kinds of arrays, such as in chains of QDs. QD chains create a bridge from zero- to onedimensional nanostructures and show interesting optical [17,18,19] and transport behaviors [20]. We could show that InAs QD chains grown onto groove-like
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