Abstract
Highly conductive and transparent amorphous IZO films were fabricated by combining deep ultraviolet (DUV) excimer laser irradiation with solution combustion synthesis at low temperature. The influence of laser energy densities on the crystallinities, surface morphologies, and optical and electrical properties of the IZO films was investigated by using X-ray diffraction, scanning electron microscope, atomic force microscope, UV–vis spectroscopy, and Hall test. Additionally, Fourier-transform infrared spectroscopy showed that DUV laser irradiation led to the removal of organic residuals and hydroxyl groups. X-ray photoelectron spectroscopy showed that the percentage of metal‒oxide‒metal bonds in the IZO films increased significantly after the laser irradiation, which was beneficial for the electron transportation. As a result, the IZO films exhibited resistivity as low as 4.2 × 10−3 Ω cm with average visible transmittance as high as 91%, which yielded the highest Figure of Merit among the solution-processed transparent conducting films prepared at a temperature as low as 200 °C.
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