The resistivity, temperature coefficient of resistivity and thermoelectric power of thin continuous metal films I: A survey and critical appraisal of the application of processing methods to experimental data

Abstract

In this paper the results are reported of an investigation into the accuracy and applicability of the methods which have been used to extract parameter values from sets of experimental data points. Theoretical models describing resistivity, temperature coefficient of resistivity and thermoelectric power of thin continuous metal films and experimental processing methods are identified and categorized. A critical appraisal is given of experimental work reported in papers published between 1961 and 1984. This is followed by details of investigations into the methods commonly used for fitting data to exact and thick film relationships. These investigations are presented within the framework of the Fuchs-Sondheimer relationships. However, the major problem areas that are identified are of a general nature and do not appear to be limited to this model. The problems with the methods investigated, especially those associated with thick film approximations, are shown to be so great as to cast doubt on many published values.