Abstract
Abstract The proton magnetic resonance spectrum of three hydrogenated silicon films (nc-Si:H, a-Si:H, annealed a-Si:H) were presented, which confirm the compositional inhomegeneity for hydrogen in the dilute and clustered phase. The deposition or post preparation condition was important for the formation of the clustered SiH phase, not only for the spatial distance between SiH bond, but for some subtle structure in NMR spectrum. The hydrogen glass behavior in silicon films was essential for the explanation of experimental results.
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