The Properties of CrSiN Coatings of Different Si Content

Abstract

CrSiN coatings of different silicon content were deposited on 1Cr18Ni9Ti austenitic stainless by d.c. reactive magnetron sputtering in a closed field unbalanced system. Comparative studies on microstructure and mechanical properties between CrN and CrSiN coatings with various Si contents were carried out. The structure of the CrSiN coatings was found to change from crystalline to amorphous structure as the Si contents increased. Amorphous phase of Si3N4 compound was suggested to exist in the CrSiN coatings. The crystalline grain became smaller in CrSiN coatings. With the increasing Si content, the coating deposition rate slew down, while the hardness of coatings improved obviously and the best hardness was about 4200 HV0.01 when the Si content was 1.13%.