Abstract
Abstract Microelectromechanical system (MEMS) has been highly valued since the size of the MEMS structure is miniaturized, the spacing between the components is in the nanometer range, and the behaviors of friction and adhesion greatly affect the reliability of MEMS. An atomic force microscope (AFM) was used to observe the surface morphology of carbon nanotube (CNT)/polymethyl methacrylate (PMMA) film, and X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical state of typical elements on the surface of the film. The friction and wear properties of composite nano-films under macroscopic conditions were systematically studied. The research results show that the composite nano-film has excellent anti-friction and anti-wear properties.
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