The possible origin of RE–Fe–B thin films with c-axis texture

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RE–Fe–B (RE-rare earth) films are prepared on a Nb buffer layer on thermally oxidized Si substrates by dc magnetron sputtering. The crystal structure, magnetic structure, and magnetic properties of RE–Fe–B films are studied. The results show that after annealing at 590°C, the c-axis texture and perpendicular anisotropy of RE–Fe–B films increase strongly with the increase of deposition temperature from 300to470°C. We suggest that the texture of the RE2Fe14B phase or the texture of the amorphous phase created in the first deposition process is a potential origin of the strong c-axis texture in the crystallized films.