Abstract

The electrical dc conductivity of amorphous carbon layers with a hydrogen content between 3 and 25 at% was investigated in the temperature range between 80 and 350 K. Additionally, optical measurements in the photon energy range between 0.05 and 3.0 eV as well as EPR measurements at two temperatures had been carried out. The conductivity values of all types of layers are discussed in terms of a thermally activated hopping process. In this sense all layers behave like semiconductors. For interpreting these conductivity data different energy band models have been applied.

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