The polycrystalline transformation during the Fe22Co22Ni22Ti22Al12 target – Coating – Nanoindentation process

Abstract

High-entropy alloy is a type of metal with good mechanical properties. However, the research on the mechanical properties of the coating is still lacking. The Fe22Co22Ni22Ti22Al12 coating was fabricated by magnetron sputtering, the thermodynamic parameters reflected the formation trend of compounds, and the microstructure structure was carried out after nanoindentation. The phase structural in target and coating were characterized by XRD, which was the widened diffraction peak of the coating, the 83.3% grain refinement with the amorphous trend in the coating. The indentation position was stripped by the focused ion beam. The microstructure of the coating and the position with indentation was observed by transmission electron microscope. The microstructure polycrystalline transformation occurred in the process. During the sputtering, the crystal of the target microstructure transformed into amorphous trendy in the coating. During the process of indentation, the crystallization point appeared again. It revealed the reason why the Fe22Co22Ni22Ti22Al12 had good macro-mechanical properties.