Abstract
Aluminum nitride is widely-used material for semiconductor devices and ceramics production. Despite the large number of known ways to obtain AlN powder, the problem of synthesizing high-purity and nanosized product is still urgent. This paper shows results on plasma dynamic synthesis of aluminum nitride using system based coaxial magneto plasma accelerator. The influence of using gaseous or solid precursors on such characteristics of the final product as phase content and particle size distribution was investigated. According to X- Ray diffractometry AlN phase content is increased in the case of use of solid nitrogen- containing precursor (melamine) in comparison with the use of gaseous nitrogen. The particle sizes distribution histograms are built in accordance with the data of bright-field TEM-images and shown in this paper. The most of particles are less than 100 nm in both experiment but there are some differences, depended on the precursor type, that are also described.
Highlights
Aluminum nitride was firstly synthesized in 1877, but only in the late of 20th century this material attracted the attention of scientists due to a number of its unique properties
This paper shows results on AlN synthesis in the discharge plasma jet generated by coaxial magneto plasma accelerator
The product obtained in the experiment with gaseous precursor strongly differs from the product synthesized in the experiment with solid precursor
Summary
Aluminum nitride was firstly synthesized in 1877, but only in the late of 20th century this material attracted the attention of scientists due to a number of its unique properties. The system based on coaxial magneto plasma accelerator can be used to obtain different ultrafine powders by varying energy and construction parameters with high efficiency [17,18,19,20]. The influence of both gaseous and solid precursors on the final product was investigated.
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