Abstract
This paper introduced Extension optimization theory into the parameters optimization of lapping process, the five process parameters of the lapping load pressure, the platen speed, the abrasive particle size, slurry flow, lapping fluid concentration are considered, the target extension decision models and integrated decision-making correlation function are established. According to the selection criteria, the optimum solution is obtained. The results showed that: as the lapping speed of 35rpm, the pressure of 11 MPa, the abrasive particle size of W7.95, the slurry flow rate of 228.75ml/min, the slurry concentration of 25%, the surface removal rate increased, the surface roughness decreases, flatness decreases.
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