Abstract

We have studied the response of a high resolution Ti/Au transition edge sensor (TES) microcalorimeter with an energy resolution of 6.2±0.7eV at 1.5keV and 7.8±0.9eV at 6.4keV. We find that the sensitivity α≡R/TdR/dT of the TES varies significantly along the superconducting-to-normal transition that the bias point traverses during a pulse. Furthermore, α is reduced significantly during a pulse compared to its equilibrium value calculated from the DC characteristics. This leads to an overestimate of the expected energy resolution when basing the prediction on the equilibrium sensitivity.

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