Abstract
The performance of X-ray microcalorimeters with a Ti/Au Transition Edge Sensor (TES) and a Cu absorber has been investigated. With these microcalorimeters we achieve energy resolutions below 4.5 eV FWHM for 5.89 keV X-rays in combination with a response time of about 100 μs. The measured energy resolution is analyzed and discussed based on spectral and RMS noise measurements. Excess noise was present which, in one case, could be fitted by noise proportional to 1α, suggesting the presence of thermal fluctuations in the TES. Variation in geometry and illumination was examined but did not influence the energy resolution.
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