Abstract
The Mn3.15Co0.3Ni0.8O4 (MCN) thin film with a three-dimensional nano-network structure was synthesized by a sol–gel technique. X-ray diffraction analysis was used to determine the film׳s composition and spinel structure. Scanning electron microscopy measurements revealed that the film exhibited a three-dimensional nano-network structure. The usefulness of the MCN film as a humidity sensor was investigated at room temperature at relative humidity (RH) values of 12–95%. The impedance of the MCN film humidity sensor was varied by approximately three orders of magnitude in the RH range from 12% to 95% with a high level of linearity. The response and recovery times of the sensor were approximately 30s and 50s, respectively. Furthermore, the MCN film humidity sensor was highly stable and reliable, suggesting potential applications of MCN films with nano-network structures in high performance humidity sensors.
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