The Mechanism of Excimer Laser-Induced Amorphization of Ultra-Thin Si Films

Abstract

ABSTRACTTo better understand the involved phase transformation Mechanism, we are studying the excimer laser-induced amorphization (ELA) of ultra-thin Si films on oxidized Si substrates. In this paper, we show that the onset of amorphization of hydrogen-free Si films on SiO2 substrates upon increases in the energy density is associated with the onset of complete melting of the film. Once complete melting occurs, further increases in the incident energy density and/or increases in the substrate temperature can lead to incomplete amorphization of the film. Planar view TEM analysis of nearly-amorphized Si films reveals a heterogeneous microstructure, which consists of a mixture of densely dispersed amorphous-like annular regions (∼20 to 40 μm−2), embedded within and typically separated by a region containing finegrained small crystals. Such a cellular microstructure strongly suggests that amorphization occurred not via a homogeneous but via a heterogeneous transformation. In particular, the microstructure paints a scenario in which amorphization proceeded via nucleation of solids, which is then followed by interfacial amorphization. The experimental results unambiguously reveal (1) that the previously proposed criteria of the melt duration and the vertical temperature gradient are irrelevant in determining amorphization of supercooled liquid Si films and (2) that the quenching rate, not surprisingly, is the important parameter.