The mechanical properties of anodic tantalum oxide films

Abstract

The mechanical properties of tantalum oxide films formed by anodizing were determined using a bulge test. The correlations between electrolytic breakdown and microstructure and between the microstructure and the observed mechanical properties are discussed. It is concluded that a direct relation exists between the incidence of crystalline film effects and the reduction in mechanical properties above a critical film thickness. The mechanical properties were found to be sensitive to the holding time at maximum cell voltage (anodic annealing time).