The Measurement Technique of Blind Hole Based on Capacitive Probe Sensor

Abstract

There are many inconvenience in measuring the diameter of blind and deep holes. The measurement device can hardly stretch into the bottom. The paper is about a capacitive probe measurement system, the whole equipment includes capacitive probe sensor, the measured hole, precision drive part, two-dimensional micro-positioning platform. A simulation analysis was done for the structural parameters, and the eccentricity between the probe and the measured hole, then a reliable measurement results were obtained.