Abstract
The Large Depth of Focus (hereinafter abbreviated to LDF) mode has been developed. The depth of focus in the LDF mode has been made 3 to 5 times larger than that in a conventional probe forming system by changing the positions of imaging points in the 3-stage lens system. The LDF mode has been applied successfully to observing the specimen with a large height difference (2 mm) without defocus and to analyzing it by EDS.
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