The investigation of traceable preparation technique of submicron particle number concentration standards in liquids

Abstract

The concentration of particles at the nano- and submicron-meter scale in liquid is crucial in multiple fields including the biomedical and semiconductor industry. However, there is still a lack of metrological standards or Certified Reference Materials (CRMs) for liquid-borne particle number concentration (PNC) which could be traceable to the International System of Units (SI). To address this issue, a quantitative and value-traceable preparation technique for liquid-borne particle number concentration CRMs (PNC-CRMs) in a submicron-meter scale based on controllable aerosol generation and collection was developed in this study. In this technique, by using commercial differential electrostatic mobility analyzer (DMA) and calibrated condensation particle counter (CPC), monodisperse aerosol particle with known concentration was initially generated. Then for quantitatively transforming the aerosol particles to the liquid, an aerosol particle collection system was designed and developed by hydrodynamic (CFD) simulations and experiment conducting, and crucial parameters of the collection system, e.g. the nozzle diameter of the aerosol particle outlet, the distance from the nozzle to the liquid surface, and the state of the liquid interface, were investigated and optimized. Under the optimized collected parameters, the collection efficiency for aerosol particles of the newly-developed system could reach over 90%. Because the PNC in aerosol is SI-traceable, combined with the obtained collection efficiency and collection time, the PNC in the collection liquid with could be obtained finally and trace to SI unit. Using this technique, two kinds of PNC-CRMs with nominal sizes of 100 and 500 nm were developed successfully, where, certified values were (7–9) × 106 particles/mL and 1.7 × 106 particles/mL, and standard uncertainties are 4.2%.