Abstract
The availability of highly charged ion sources (electron cyclotron resonance or electron beam ion source) led in the last decade to many new scientific discoveries in various fields of atomic, solid state, and plasma physics. This article will review some of the most exciting results obtained in the field of the interaction of highly charged ions on surfaces in fundamental physics (hollow atom properties, mechanisms of electron captures and losses above, below, or at surface interactions…) as well as in applied physics (surface modifications, lithography, etc.). The deceleration and monochromatization of the ion beams delivered by the ion sources will be discussed in the framework of their use in the study of the ion surface interactions.
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