Abstract
An unsteady state plasma is known to exist during the initial stage of the glow discharge decomposition of silane (SiH 4) gas. The properties of the i layer deposited in this unsteady state plasma and p-i-n stacked hydrogenated amorphous silicon solar cells having such an i layer were investigated. It was found that this layer had an undesirably wide optical band gap and low conductivity because of the large number of SiH 2 sites.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
