Abstract
The influence of the temperature and Ti and TiN sublayer material on the height, diameter, density, and uniformity of carbon nanotubes (CNTs) growth is studied. It was found that on the TiN sublayer, CNTs form an array with a more uniform diameter distribution of CNTs than on the Ti sublayer (minimum dispersion 5.6 nm versus 8.1 nm). It is shown that for the Ti sublayer, with an increase in the growth temperature, an almost linear increase in the CNT height occurs. It was found that an increase in the CNT height is accompanied by a decrease in their diameter for both sublayers. For a given thickness of Ni, arrays with a density of 3–18 μm−2 were obtained on the Ti sublayer, and on a TiN sublayer in the range of 8–21 μm−2. The greatest uniformity of the surface distribution of CNTs is showed at 660 °C. CNT arrays on the Ti sublayer are characterized by a lower concentration of bundles than on the Ti sublayer.
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