Effect of different carrier gases and their flow rates on the growth of carbon nanotubes

Abstract

The present paper examines the effect of different carrier gases and their flow rates on the growth of carbon nanotubes (CNTs). A theoretical model is developed incorporating the charging rate of the carbon nanotube, kinetics of all the plasma species, and the growth rate of the CNTs because of diffusion and accretion of ions on the catalyst nanoparticle. The three different carrier gases, i.e., argon (Ar), ammonia, and nitrogen, are considered in the present investigation, and flow rates of all the three carrier gases are varied individually (keeping the flow rates of hydrocarbon and hydrogen gas constant) to investigate the variations in the number densities of hydrocarbon and hydrogen ions in the plasma and their consequent effects on the height and radius of CNT. Based on the results obtained, it is concluded that Ar favors the formation of CNTs with larger height and radius whereas ammonia contributes to better height of CNT but decreases the radius of CNT, and nitrogen impedes both the height and radius of CNT. The present work can serve to the better understanding of process parameters during growth of CNTs by a plasma enhanced chemical vapor deposition process.