Abstract
The high-frequency spraying method has been used to produce Ba x Sr1–xTiO3 thin films on (111)Pt/(100)Si and SiOx/(100)Si substrates. The synthesized films have proven to be single-phase with a polycrystalline structure. In this paper, we show the influence of the platinum sublayer on such parameters as roughness, mean size of grains, and the local polarization of Ba x Sr1–xTiO3 thin films. Possible mechanisms of the obtained results related to the intragrain conductivity and the nature of interaction of a ferroelectric film with its substrate are discussed.
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