Abstract
Image patterns formed by low voltage aberration-corrected high resolution transmissionelectron microscopy (HRTEM) of few layer graphene provide insight into the number oflayers present. For odd numbers of graphene layers (three layers or more) and evennumbers of graphene layers, distinctly different image patterns are produced. Asheet with step edges of between zero, one, two and three layers of graphene isfabricated using in situ electron beam sputtering at 80 kV and atomic resolutionimages are obtained. A correlation between the theoretically generated imagesimulations and the real HRTEM images is found and this enables us to distinguishbetween monolayer, bilayer, and trilayer graphene using image pattern recognition.
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