Abstract
In this work we present studies on the influence of oxygen partial pressure on the properties of sputtered vertical NiO/β-Ga2O3 heterojunction diodes. Obtained results shows substantial effect of oxygen partial pressure on the electrical properties of NiO/β-Ga2O3 heterojunction diodes. The diodes with NiO layers deposited in pure Ar shows Schottky-like I-V characteristics with low ideality factor of 1.05 and barrier height of 1.27 eV as well as low turn-on voltage close to 1V. On the other hand, diodes with NiO layer deposited in oxygen containing atmosphere shows typical p-n diode characteristics. The best electrical characteristics i.e. low on-state resistance of 2.85 mΩcm2, lack of defects and low ideality factor down to 1.07 at RT along with high breakdown voltage close to 900V without any junction termination, were obtained for diodes with NiO layers deposited at 50 % oxygen content. We have demonstrated that by optimization of oxygen partial pressure, the properties of NiO/β-Ga2O3 heterojunction diodes can be tuned and excellent electrical performance in terms of low-on state resistance, high breakdown voltage, low-leakage current and low ideality factor, can be obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.