Abstract

Since protective transition metal (oxy)nitride coatings are widely used, understanding of the mechanisms linking microstructure to their fracture behaviour is required to optimise wear resistance, while maintaining fracture toughness. To assess this interconnection, beam bending was performed using microcantilevers oriented parallel and at 90° to the growth direction. Furthermore, the tests were applied to favour normal bending and shear fracture. Coatings were synthesised by both direct current magnetron sputtering (DCMS) as well as high power pulsed magnetron sputtering (HPPMS). Here, we show that the fracture toughness depends on the alignment of the grains and loading directions. Furthermore, an improved fracture toughness was found in coatings produced by HPPMS, when microstructural defects, such as underdense regions in DCMS deposited coatings can be excluded. We propose indices based on fracture and mechanical properties to rank those coatings. Here, the HPPMS deposited oxynitride showed the best combination of mechanical properties and fracture toughness.Graphical abstractPrinciple of measuring the effects of microstructure and process route on the fracture toughness via microcantilever bending.

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