The influence of methane concentration, substrate temperature, and pressure on the morphology of diamond films grown by dc plasma jet CVD

Abstract

Diamond films have been synthesized via DC are discharge plasma jet chemical vapour deposition. The diamond films have been examined by scanning electron microscopy (SEM), X-ray diffraction, Raman spectroscopy and XPS spectroscopy. It is found that the quality of the deposits comes close to that of natural diamond. Examination of the obtained diamond films by scanning electron microscopy (SEM) shows that the morphologies of these films are strongly affected by synthesis conditions, especially the substrate temperature, the methane concentration, and the total pressure in the deposition chamber.