Abstract
The effects of low temperature baking on properties of SrBi2Ta2O9 films have been examined. The morpholgy is strongly influenced by the heat treatment chosen. A slow heating rate and an oxidising atmosphere give films on which larger and inhomogeneous grains were seen by AFM. Additionally, ToF-SIMS shows that this heat treatment increases the chemical homogeneity of the ferroelectric film. Contrasting effects are seen; the furnace treatment increases the remnant polarisation but rapid thermal treatments reduce the leakage currents. Keywords strontium bismuth tantalate, SBT, heat treament, SIMS, metallorganic decomposition (MOD), memories.
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