Abstract
ABSTRACTIon implantation of ceramics such as Al2O3 and SiC may produce a highly damaged but crystalline surface layer or an amorphous surface. The specific structure depends upon the implantation parameters. Studies using microindentation techniques show that a crystalline implanted surface has a higher hardness (by 10 to 50%) than the corresponding unimplanted crystal but the elastic modulus is essentially unchanged. The hardness and elastic modulus of amorphous implanted surfaces are less than those of the crystalline material. Estimates of the residual stress have been obtained from microindentation tests.
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