Abstract
Different grades of CVD diamond films were prepared by 100 kW DC Arc Plasma Jet system. The films were characterized using optical microscope (OM), high-resolution transmission electron microscopy (HRTEM), electron energy-loss spectroscopy (EELS), and Raman spectroscopy. The results show that dark feature mainly is inclusions in CVD diamond films, the concentration are amorphous carbon and nitrogen. As for transparent optical grade diamond film, it has very high IR transparency and high thermal conductivity. The appearance of dark feature degraded the quality of CVD diamond film, apparently influencing IR transparency and thermal conductivity. But even in optical grade diamond film, there are very strong absorption features in the 7–9 μm region, this will limit the practical applications of diamond films grown by Plasma Jet as IR windows for CO 2 lasers.
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